发明名称 Semiconductor wafer, semiconductor device, and semiconductor device manufacturing method
摘要 A semiconductor wafer includes a plurality of chip areas, a scribe line area, a bonding pad, a probing pad, and a pad connection wiring. The plurality of chip areas are configured to be arranged in a matrix form. The scribe line area is configured to separate the plurality of chip areas from each other. The bonding pad is configured to be connected with an external terminal. The probing pad is configured to be contacted with a probe wire. The pad connection wiring is configured to electrically connect the bonding pad to the probing pad. The bonding pad and the probing pad are located at a predetermined distance from each other in each of the plurality of chip areas. The pad connection wiring has a portion located in the scribe line area.
申请公布号 US2008210935(A1) 申请公布日期 2008.09.04
申请号 US20070713436 申请日期 2007.03.02
申请人 EBARA ATSUSHI 发明人 EBARA ATSUSHI
分类号 H01L21/66 主分类号 H01L21/66
代理机构 代理人
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