| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an extreme ultraviolet light source for exposure with a relatively large output in which a solid target is rapidly and continuously supplied while carrying out excellently heat removal to the irradiation of driver laser beams. <P>SOLUTION: The extreme ultraviolet light source is equipped with a chamber in which generation of extreme ultraviolet light is carried out, a target substance supply means for coating a target substance on a wire, a wire supply means to supply the wire coated with the target substance to a prescribed position in the chamber, a driver laser which generates plasma by irradiating laser beams on the wire coated with the target substance, and a collector mirror which condenses and emits extreme ultraviolet light irradiated from plasma. <P>COPYRIGHT: (C)2008,JPO&INPIT |
