| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum ultraviolet light emitting element which is formed of a fluoride crystal emitting light at high luminance in the vacuum ultraviolet region and can be suitably used for photolithography, cleaning of a substrate of semiconductor or liquid crystal, sterilization, a large-capacity optical disk for next generation, medical treatment (ophthalmological treatment or DNA incision) or the like. SOLUTION: The fluoride crystal is expressed by chemical formula: La<SB>1-x-y</SB>Ba<SB>x</SB>Nd<SB>y</SB>F<SB>3-x</SB>(wherein, x and y are within a range of 0.01-0.2 and a range of 0.001-0.5, respectively). It is preferable that a single crystal of the fluoride crystal is produced and the obtained fluoride single crystal is processed into the vacuum ultraviolet light emitting element. COPYRIGHT: (C)2008,JPO&INPIT
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