PIEZOELECTRIC VIBRATOR, PIEZOELECTRIC VIBRATION GYRO USING THE SAME AND MANUFACTURING METHOD OF THE PIEZOELECTRIC VIBRATOR

摘要

PROBLEM TO BE SOLVED: To form a piezoelectric body film and perform non-adhesion by pressurization, heating and composition in the thickness direction of the outer face of a vibrator. SOLUTION: The piezoelectric body film is directly formed on the surface of the drive part 1 of the vibrator 3 and the surface of a detection part 2 by the pressurization, heating and composition.