发明名称 INKJET DEVICE ENCAPSULATED AT THE WAFER SCALE
摘要 <p>Micro-fabricated devices (152) is packaged at the wafer (150) stage with a cap (156, 160) applied to one or both sides of the wafer (150) prior to separation of the wafer into separate devices. The cap (156) on the top side overlays the respective device(s) (152), except the bond pads (158). The cap (160) on the bottom overlays all of the respective device(s) (152).</p>
申请公布号 WO02056360(A1) 申请公布日期 2002.07.18
申请号 WO2002AU00014 申请日期 2002.01.08
申请人 SILVERBROOK RESEARCH PTY. LTD.;SILVERBROOK, KIA 发明人 SILVERBROOK, KIA
分类号 H01L23/02;B41J2/04;B41J2/14;B41J2/16;B81B7/00;H01L23/04;(IPC1-7):H01L21/52;H01S5/022;B81C1/00;B81B7/04 主分类号 H01L23/02
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