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发明名称
FORMULATION OF A SILICON GERMANIUM-ON-INSULATOR STRUCTURE BY OXIDATION OF A BURIED POROUS SILICON LAYER
摘要
申请公布号
KR100856988(B1)
申请公布日期
2008.09.04
申请号
KR20067003316
申请日期
2006.02.17
申请人
发明人
分类号
H01L27/12;C22F1/10;H01L21/20;H01L21/762
主分类号
H01L27/12
代理机构
代理人
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