| 摘要 |
PROBLEM TO BE SOLVED: To provide a lever excitation mechanism capable of improving a vibration characteristic, and a scanning probe microscope having the lever excitation mechanism. SOLUTION: The lever excitation mechanism 1a has a constitution with a lever 3c of a cantilever 3 extending in the longitudinal direction toward the tip side from the base end side; a slant block 10 for supporting the base end in a cantilever state, while treating the tip part of the cantilever 3 as a free end; and an excitation source 11 for vibrating the lever 3c in a prescribed vibration state through the slant block 10. The slant block 10 includes a notched groove part 13 for sandwiching the excitation source 11 from both sides in the vibration state to fix it, and the notched groove part 13 has a prescribed interference relative to the thickness in the vibration direction of the excitation source 11, and the excitation source 11 is fixed in the interference-fitted state in the vibration direction by the notched groove part 13. The scanning probe microscope 1 has a constitution with the lever excitation mechanism 1a, a moving means 5 for moving relatively a probe 3a and a sample S, a measuring means 6 for measuring displacement in the vibration state of the lever 3c, and a control means 8 for collecting observation data. COPYRIGHT: (C)2008,JPO&INPIT
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