| 摘要 |
An exemplary PECVD device includes a first electrode ( 21 ), a second electrode ( 22 ) parallel to the first electrode, and a radio frequency (RF) circuit ( 23 ) providing energy for the two electrodes. The first electrode includes at least two separated sub-electrodes ( 211, 212 ). The RF circuit includes an RF power supply source ( 230 ) and at least two variable resistors ( 231, 232 ). The RF power supply source is connected to the at least two sub-electrodes via the at least two variable resistors respectively. The PECVD device can deposit a uniform thin film.
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