发明名称 |
CVD-DIAMANTBESCHICHTETES VERBUNDSUBSTRAT UND HERSTELLUNGSVERFAHREN DAFÜR |
摘要 |
The present invention relates to a composite material and the method of making same, which comprises a CVD diamond coating applied to a composite substrate of ceramic material and an unreacted carbide-forming material of various configurations and for a variety of applications. One example of the composite material is a composite of SiC and free silicon metal known as Reaction-Bonded Silicon Carbide. Several examples of applications of the invention include: 1) heads or disks for conditioning polishing pads, including pads used in Chemical-Mechanical-Planarization, 2) cutting and dressing tool inserts and tips, 3) heat spreaders for electronic devices, and 4) wear components including mechanical seals and pump seals. |
申请公布号 |
DE602004015294(D1) |
申请公布日期 |
2008.09.04 |
申请号 |
DE20046015294T |
申请日期 |
2004.07.26 |
申请人 |
MORGAN ADVANCED CERAMICS INC. |
发明人 |
SLUTZ, DAVID E.;FINKE, STEVEN J. |
分类号 |
C23C16/02;B24B37/04;B24B53/12;B24D18/00;C04B41/50;C04B41/85;C23C16/27;F16J15/34 |
主分类号 |
C23C16/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|