PROBLEM TO BE SOLVED: To provide a determination method which is capable of properly determining reference information for evaluating a film used for liquid-immersion exposure. SOLUTION: The determination method for determining reference information for evaluation of a first film for liquid-immersion exposure includes the steps of: moving a first liquid holding member and a substrate under a plurality of movement conditions with liquid held between the first liquid holding member used in a liquid-immersion exposure apparatus and the substrate on which a second film is formed; detecting a state of the liquid on the second film when moved them; relatively moving a second liquid holding member and a substrate under the plurality of movement conditions with liquid held between the second liquid holding member being different from the first liquid holding member and the substrate on which a second film is formed; detecting a state of the liquid held on the second film when moved them; and determining reference information on the basis of the relative movement conditions of the second liquid holding member and the substrate. COPYRIGHT: (C)2008,JPO&INPIT
