| 摘要 |
PROBLEM TO BE SOLVED: To apply a material onto a sample surface; to introduce it into a sample; and to measure properly the state of the sample surface. SOLUTION: A material supply probe device 1a has a constitution equipped with a hollow glass capillary 21 having a sharpened tip part 21a, a plunger 22 and a linear actuator 23 capable of changing a pressure by being reciprocated in the hollow glass capillary 21, an excitation source 12, a measuring part 14 for detecting displacement of the tip part 21a of the hollow glass capillary 21, and a moving part 13 for moving relatively the tip part 21a of the hollow glass capillary 21 based on a detection result by the measuring part 14. A scanning probe microscope 1 has a constitution equipped with the material supply probe device 1a, a sample capturing probe 15, and a moving part 16 for moving relatively the sample capturing probe 15. COPYRIGHT: (C)2008,JPO&INPIT
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