| 摘要 |
PROBLEM TO BE SOLVED: To make small-sized a lighting system for an optical shape measuring instrument, and to improve the reliability without making an optical system large-sized even when a different pattern is irradiated by an irradiation optical system of a pattern irradiating method. SOLUTION: This system is composed of a flash light source 3 such as a xenon tube and a filter unit 4. The filter unit 4 has two cylindrical concave lenses 13 and two density filters 14 arranged in a base-line vertical direction Z. The two density filters 14 are formed by printing density distributions on color films of red and blue. The flash light source 3 emits light from the side of the density filters 14, and the incident light 30 is transmitted through the two density filters 14 and cylindrical concave lenses 13 to irradiate an object surface 18.
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