METHOD AND APPARATUS FOR FABRICATING THIN FILM BY USING NANO PARTICLE BEAM

摘要

A method and an apparatus for fabricating a thin film by using a nano-particle beam are provided to form easily the thin film having a complicated ratio of components by eliminating an additional chemical reaction. Nano-particles are formed by using nano-powders(106) as components of a thin film. The nano-particles are electrified. The electrified nano-particles are changed into the accelerated nano-particle beams by applying electric field to the electrified nano-particles. The accelerated nano-particle beams become components of a thin film by causing collision between the accelerated nano-particle beams and a substrate(136). The process for electrifying the nano-particles includes a process for generating plasma in a mixing state of the nano-powders and an inert gas.