POLISHING PAD GROOVE PROCESSING MACHINE, AND POLISHING PAD GROOVE PROCESSING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a machine and method for a polishing pad groove processing, in which chips produced by cutting are securely removed from a tool so that groove processing is stably performed.

SOLUTION: The polishing pad groove processing machine cuts a number of grooves in the surface of a polishing pad 1. It comprises: a cutting device 2, comprising a multiple blade tool with a plurality of cutting blades 8 aligned and projected, in such a way that the cutting blades 8 are displaceable between a cutting position closer to the surface of the polishing pad 1 and a non-cutting position 2 apart from it; air blow devices 3 and 4 to blow air to the cutting blades 8 for cooling them; a dust collecting machine 5 to suck and recover chips produced by cutting; a cleaning device 6 comprising a brush 9 displaceable between a cleaning position closer to the cutting blades 8 in the non-cutting position and a stand-by position apart from them; and a control device 7 to control displacement of the brush 9 at least.

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