| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck having a good corrosion resistance to halogen gas or its plasmas in the electrostatic chuck including a gas flow path in an inner part of an insulator constituting the electrostatic chuck. SOLUTION: In the electrostatic chuck including an electrostatic electrode 5 in the inner part of the insulator 2 the insulator 2 has a laminated structure formed by laminating, pressing, and sintering a ceramic green sheet. In order to supply gas for temperature control of an absorbed member to an absorption surface 3 of the insulator 2, a gas flow path 11 having a gas port 15 on the absorption surface 3 is provided in the inner part of the insulator 2. The insulator 2 is formed from a yttria sintered body obtained by using, as the ceramic green sheet, a yttria green sheet containing yttria as a main component. COPYRIGHT: (C)2008,JPO&INPIT |
