SILOXANE POLYMER, METHOD FOR PRODUCING THE SAME, COATING LIQUID FOR FORMING POROUS FILM CONTAINING THE POLYMER, POROUS FILM AND SEMICONDUCTOR APPARATUS USING THE POROUS FILM

摘要

PROBLEM TO BE SOLVED: To obtain a siloxane polymer that forms a porous film having a more excellent mechanical strength than that of a conventional siloxane polymer by using a siloxane polymer being an industrially preferable material and is synthesized by a new method, a composition for forming a film containing the same, to provide a method for forming a porous film, to obtain a formed porous film and to provide a semiconductor apparatus having the built-in porous film and high performance and high reliability.

SOLUTION: The method for producing a siloxane polymer by hydrolysis condensation of a hydrolyzable silane compound comprises preparing a cage compound salt of a silsesquioxane represented by general formula (1): (SiO1.5-O)nn-X+n(wherein X is NR4; Rs are each a 1-4C straight-chain or branched-chain alkyl group and each independently the same or different; and n is an integer of 6-24) and using a siloxane polymer obtained by hydrolyzing and condensing a hydrolyzable silane compound as the cage compound salt of the silsesquioxane.

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