| 摘要 |
PROBLEM TO BE SOLVED: To provide a film forming device capable of covering the entire peripheral edge of a circular substrate by supplying a composition for forming a film in a single process. SOLUTION: The film forming device 1 has a holding section 20 for holding the circular substrate 100 and rotating it in a substrate in-plane direction, and a supply unit 10a for supplying the composition for forming a film to the peripheral edge of the circular substrate 100. COPYRIGHT: (C)2008,JPO&INPIT
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