| 摘要 |
PROBLEM TO BE SOLVED: To provide a MEMS (Micro Electro Mechanical System) element, having less attachment between a substrate and a movable part, and also to provide a simple manufacture method of it. SOLUTION: The movable part 11 of a MEMS structure 1 comprises: a large movable part 15; and an intermediate movable part 14. A distance d1 between the large movable part 15 and a silicon substrate 3 is longer than a distance d2 between the intermediate movable part 14 and the silicon substrate 3. The large movable part 15 includes a part where displacement quantity toward the silicon substrate 3 is the largest. Though the part where the displacement quantity toward the silicon substrate 3 is the largest has more chances of getting in contact with the silicon substrate, chances of the large movable part 15 to get in contact with the silicon substrate 3 are minimized as the distance between the large movable part 15 and the silicon substrate 3 is longer. The MEMS element 10 in which attachment to the silicon substrate 3 is less likely to occur is thus provided. COPYRIGHT: (C)2008,JPO&INPIT
|
