| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating machine allowing replacement of coating liquids only by switching valves without replacing nozzles. SOLUTION: When a coating liquid R1 is replaced with a coating liquid R2, the interior 1 of a slit nozzle 1 is first cleaned. Specifically, first of all the valves 6a, 9a, 14a are opened and the other valves are closed. Then, a pump 19 is driven to feed a liquid to a liquid feed pipe 6 from a circulation liquid pipe 9. The liquid is not necessarily a virgin liquid, but may be a used liquid having a certain cleaning power. The liquid fed to the liquid feed pipe 6 flows through the liquid feed pipe 6, flows from a feed port 3 of the slit nozzle 1 via passage 2 and reaches a discharge port 4 via a passage 2, and then flows from the discharge port 4 to return again to the circulation liquid pipe 9 via a liquid discharge pipe 12 and a pipe 14. The interior of the passage 2 of the slit nozzle 1 and the interior of the liquid feed pipe 6 are cleaned by repeating the above processes. COPYRIGHT: (C)2008,JPO&INPIT
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