Dispenser For Carburetor, Carburetor For Mocvd Using the Dispenser For Carburetor, and Carrier Gas Vaporizing Method

摘要

An object of the present invention is to provide a disperser for vaporizer capable of preventing a fluid dispersion from being crystallized when a carrier gas into which thin-film forming materials are dispersed is injected from a terminus end injection port, a vaporizer for MOCVD using the disperser for vaporizer, and a carrier gas vaporizing method. A plurality of thin-film forming materials are dispersed into a carrier gas introduced into a gas passage by a dispersion section located in a midway portion of a gas passage 35 into which the carrier gas is introduced. An air flow substantially along the injection direction of carrier gas into which the plurality of thin-film forming materials injected from an terminus end injection port 35 b are dispersed is injected from an air flow injection port 38 formed near the terminus end injection port 35 b located in the downstream end portion of the gas passage 35.