发明名称 OPTICAL IMAGING ARRANGEMENT
摘要 <p>An optical element arrangement is provided comprising an optical element unit, a first support structure and a reference external to the optical element unit. The optical element unit comprises an optical element group, at least one optical element unit reference associated to the optical element group and a second support structure supporting the optical element group. The optical element group comprises a plurality of optical elements defining an optical axis of the optical element group. The optical element unit reference has a reference position with respect to the external reference. The first support structure supports the optical element unit via a plurality of support elements, the plurality of support elements being arranged to support the optical element unit such that, upon thermal expansion of at least one of the optical element unit and the first support structure, the reference position, at least along the optical axis, remains substantially unchanged.</p>
申请公布号 WO2008104220(A1) 申请公布日期 2008.09.04
申请号 WO2007EP51855 申请日期 2007.02.27
申请人 CARL ZEISS SMT AG;KNUEFERMANN, DR. MARKUS;BISCHOFF, THOMAS;DENGEL, GUENTER 发明人 KNUEFERMANN, DR. MARKUS;BISCHOFF, THOMAS;DENGEL, GUENTER
分类号 G03F7/20;G02B7/00 主分类号 G03F7/20
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