| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and a device for sterilization, capable of providing sufficient sterilization effect, which is harmless with no residual gas. <P>SOLUTION: The method comprises a pressure reduction process to reduce the pressure of a chamber, a hydrogen peroxide supply process to supply hydrogen peroxide into the chamber, an ozone supply process to supply ozone to the chamber, a sterilization process to sterilize subject matter by diffusing supplied hydrogen peroxide and ozone in the chamber, an exhaust process to exhaust gas in the chamber, and a plasma generating process to generate plasma in the chamber. The processes from the hydrogen peroxide supply process to the plasma generating process are repeated for a plurality of times. <P>COPYRIGHT: (C)2008,JPO&INPIT |
