| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a system for removing a liquid from a substrate table, in particular, from a gap between the substrate table and a substrate, and to provide a method therefor. <P>SOLUTION: In the liquid removing method, the liquid is removed from the substrate held on the substrate table and from the gap between the substrate and the substrate table. A liquid removing device is provided with at least one outlet port, forming a predetermined geometric long and thin extractor; the substrate table is moved relative to the liquid removing device so that the extractor passes all through the substrate and the gap; and that the local tangent in the local portion of the extractor at the end of non-dry portion in the gap substantially holds the angle between about 35° and 90° on a planar view, at arbitrary times with respect to that in the gap. <P>COPYRIGHT: (C)2008,JPO&INPIT |
