| 摘要 |
PROBLEM TO BE SOLVED: To provide a heater preventing deterioration of moisture absorption and withstand voltage. SOLUTION: A heater A1 is provided with; a substrate 1, a heat generating resistor 2 formed on the substrate 1, a crystallized glass layer 31 covering the heat generating resistor 2, and a protective film 3 with an amorphous glass layer 33 covering the crystallized glass layer 31. The protective film 3 is additionally provided with a semicrystalline glass layer 32 surrounding an edge 31a of the crystallized glass layer 31 and existing between a part of the amorphous glass layer 33 coming out of the crystallized glass layer 31 and the substrate 1. COPYRIGHT: (C)2008,JPO&INPIT
|
