| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a soiling determination apparatus that determines the extent of soiling together with its position on a protective glass of a laser beam machine. <P>SOLUTION: The soiling determination apparatus incorporates a reflection mirror for changing the irradiation direction of a laser beam. The surface of a transparent protective plate 18 of a laser beam machine is divided into a plurality of regions, the transparent protective plate covering the outgoing port of laser beam emission of the laser beam machine. Each of the plurality of divided regions is irradiated with a laser beam to measure the quantity of the laser beam in each region. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
