| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate carrier for carrying a chucked insulating substrate. SOLUTION: A chucking device 23 having electrodes of 4 mm wide arranged at an interval of 2 mm or less is fixed to the arm 22 of a substrate carrier 20. Since a big gradient force is obtained, an insulating substrate 11 can be chucked. The insulating substrate 11 can be carried in a suspended state or standing state. COPYRIGHT: (C)2008,JPO&INPIT |
