| 摘要 |
PROBLEM TO BE SOLVED: To inexpensively provide an electrostatic chuck which has a large diameter of 300 mm or larger and a favorable temperature control characteristic and can be used at a high temperature, and an electrostatic chuck with a heater. SOLUTION: An electrostatic chuck structure comprises a titanium base and alumina or YAG-sprayed films that function as insulating layers. Alumina and YAG are materials that have thermal expansion coefficients extremely close to that of pure titanium. Each alumina and YAG to be used must have a purity of 99.9% or higher. The sprayed insulating layers have dramatically extended lifespans since alumina and YAG have high resistance especially in plasma environments. COPYRIGHT: (C)2008,JPO&INPIT |
