| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of forming an attraction surface of an electrostatic chuck by using a method other than an embossing method so that an irregular pattern formed on the electrostatic chuck having the resin attraction surface has a shape and dimensions that are less likely to be changed by time passage or temperature rise. SOLUTION: An electrostatic chuck that holds a substrate by using electrostatic attraction force has the irregular pattern that is formed on an attraction surface of the electrostatic chuck by means of a photosensitive film. Forming the irregular pattern in the last stage of the production process of the electrostatic chuck prevents the embossed or grooved pattern in process from being damaged by mishandling. COPYRIGHT: (C)2008,JPO&INPIT |
