| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of obtaining the height of a chuck top that allows reduction of variations in the height of the chuck top to thereby apply a certain overdrive at every time, and a program recording medium in which the method is recorded. SOLUTION: The method of obtaining the height of a chuck top comprises the steps of: designating coordinate values x, y of five points of the center, left, right, top, and bottom of the top surface of a chuck top 11 on an ideal coordinate surface to measure the height of the chuck top 11 corresponding to the five points by an upper camera; setting a circular cone model in which measured values of two points A, B adjacent each other except the center O of the chuck top 11 corresponding to above each designated coordinate value in a given quadrant in the XY coordinate plane are the points obtained from changes on the circumference of a circle that is formed with the center O of the chuck top 11 as the center; and designating an arbitrary point in the given quadrant to obtain the height Z as an arbitrary point of the chuck top 11 based on the designated coordinate values, a given coordinate transformation, and the circular cone model. COPYRIGHT: (C)2008,JPO&INPIT |
