| 摘要 |
PROBLEM TO BE SOLVED: To provide a pitch converter of simpler structure. SOLUTION: As a motor 430 rotates, a rotating motion is transformed into linear motion, so that a wafer holding part 310g moves to the right. According to the movement, wafer holding parts 310h-310j connected to a link member 321C and 321J as well as wafer holding parts 310j-310l connected to a link member 321D and 322X move upward while enlarging intervals. The adjoining wafer holding parts 310 and two link members connecting both constitute a parallel link mechanism, with the lengths of corresponding links of each parallel link mechanism being equal. So wafer holding parts 310g-310m are kept in parallel each other always, and the intervals of the wafer holding parts 310g-310m are kept in uniform always as well. Since link members 321I, 321J, 322W, and 322X constitute a pantograph mechanism, the motion of a connection part between the link members 321I and 321J and the wafer holding part 310g is magnified twice, which is exhibited at the connection part between the link member 322W and a wafer holding part 310a. COPYRIGHT: (C)2008,JPO&INPIT |
