| 摘要 |
PROBLEM TO BE SOLVED: To provide a small sized cryopanel cooling structure suitable for reduction of cooling time of a cryopanel and improvement of exhaust speed without using a large sized refrigerator having high refrigeration capacity. SOLUTION: In the cryopanel cooling structure which connects the cryopanel 2 in a vacuum chamber 1 and a refrigerator 3 in an outside of the vacuum chamber 1 by heat conductive material 4, and cools the cryopanel 2 by the refrigerator 3 via the heat conductive material 4, the heat conductive material 4 is manufactured by using composite embedding fiber highly heat conductive material such as carbon fiber into metal matrix having heat capacity per unit volume lower than that of copper such as aluminum. COPYRIGHT: (C)2008,JPO&INPIT
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