| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device capable of identifying visually or automatically a defective portion which was indistinguishable by eyes. SOLUTION: The charged particle beam device irradiates and scans charged particle beams 2 on a test piece 6 and detects a signal such as secondary electrons or the like generated from the test piece 6 to obtain information on the surface or inside of the test piece. The device is constructed by comprising at least one probe 8 to be contacted to an arbitrary portion of the test piece 6 and detect an absorption current, an current/voltage transformer 9 to convert the absorption current detected by the probe 8 into a voltage signal, and a display means (synchronization device) 10 which displays by superposing the output of the current/voltage transformer 9 and the signal of the secondary electrons or the like. COPYRIGHT: (C)2008,JPO&INPIT
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