| 摘要 |
PROBLEM TO BE SOLVED: To eliminate interference of a front end of a conveying article at a non-floating up area between conveying units by deflection by own weight in a device for conveying a thin plate-like conveying article in its plane direction in the state that the thin plate-like conveying article such as a glass substrate for a liquid crystal panel is floated up by air. SOLUTION: Air nozzles are collectively arranged at both front and rear ends of the conveying unit 11, and the conveying article 1 is floated up in the recessed shape state that it becomes a projection to a lower side. Thereby, the front end 1a is displaced to an upper side to suppress downward displacement by the own weight. COPYRIGHT: (C)2008,JPO&INPIT
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