发明名称 SEMICONDUCTOR SUBSTRATE AND SEMICONDUCTOR DEVICE USING THE SAME
摘要 A semiconductor substrate includes: an AlN layer provided on a silicon substrate; an AlGaN layer that is provided on the AlN layer and has an Al composition ratio of 0.3 to 0.6; and a GaN layer provided on the AlGaN layer.
申请公布号 US2008210949(A1) 申请公布日期 2008.09.04
申请号 US20070965302 申请日期 2007.12.27
申请人 EUDYNA DEVICES INC. 发明人 MAKABE ISAO;NAKATA KEN
分类号 H01L29/205;H01L33/32;H01L33/34 主分类号 H01L29/205
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