| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of forming a soft magnetic layer, having a saturated coercivity Hc and low anisotropic magnetic field Hk and high saturated flux density Bs. SOLUTION: A magnetic layer having a first axis magnetization direction and a second axis magnetization direction which cross each other is formed, by electroplating using soft magnetic materials on a substrate 9. Thereafter, the soft magnetic layer is heated while a first magnetic field is applied to the first axis magnetization direction (first annealing process), next the soft magnetic layer is heated while a second magnetic field is applied to the second axis magnetization direction (second annealing process). The two-stage annealing process reduces the magnetization easy-axis saturated coercivity Hce, a magnetization hard-axis saturated coercivity Hch, and the anisotropic magnetic field Hk of the magnetic layer. COPYRIGHT: (C)2008,JPO&INPIT
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