| 摘要 |
PROBLEM TO BE SOLVED: To provide a sheet-like probe allowing certain prevention of a positional shift of electrode structures and inspected electrodes caused by a temperature change in a burn-in test even if an inspection target is a large-area wafer of a diameter≥8 inches or a circuit device having the inspected electrodes of an extremely small pitch to stably maintain an excellent electric connection state, and to provide a manufacturing method therefor and application thereof. SOLUTION: In this sheet-like probe, the plurality of electrode structures respectively disposed according to a pattern corresponding to the electrodes to be connected, each having an exposed front face electrode part in the front face and an exposed rear face electrode part in the rear face each have a contact film held by an insulating film of a soft resin and a frame plate supporting the contact film. COPYRIGHT: (C)2005,JPO&NCIPI
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