发明名称 PROCESS FOR REACTIVE ION ETCHING A LAYER OF DIAMOND LIKE CARBON
摘要 Provided is a process for manufacturing a diamond like carbon layer. The process for manufacturing the diamond like carbon layer includes, without limitation, forming a layer of diamond like carbon over a substrate, and reactive ion etching the layer of diamond like carbon.
申请公布号 US2008214016(A1) 申请公布日期 2008.09.04
申请号 US20070681483 申请日期 2007.03.02
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 SHOEMAKER ERIKA LEIGH;WANG MARIA;ROBY MARY;JACOBSEN STUART
分类号 H01L21/00;B44C1/22 主分类号 H01L21/00
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