WAVEGUIDE STRUCTURE, MANUFACTURING METHOD THEREOF AND HAMR USING THE SAME

摘要

A manufacturing method of a waveguide structure includes forming a metal layer of a predetermined size on a substrate to form a structure, forming a lower clad layer on the structure in order to completely cover the metal layer, forming a core layer of a predetermined size on the lower clad layer at the location corresponding to the metal layer, and forming an upper clad layer thereon in order to completely cover the core layer.