| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitor with reduced leak current and enhanced reliability, and to provide a manufacturing method for such a capacitor. SOLUTION: A capacitor 100 includes a lower electrode layer 10, a dielectric layer 20 provided above the lower electrode layer 10, and an upper electrode layer 30 provided above the dielectric layer 20. At least one of the lower electrode layer 10 and the upper electrode layer 30 has a conductive oxide layer provided in contact with the dielectric layer 20 and a metal layer provided at the outer side from the conductive oxide layer relative to the dielectric layer 20. Viewed from a planar surface, a contour of the conductive oxide layer is at the inner side from a contour of the surface on the side where the dielectric layer is in contact with the conductive oxide layer. COPYRIGHT: (C)2008,JPO&INPIT
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