| 摘要 |
PROBLEM TO BE SOLVED: To provide a transmission-type scanning charged-particle beam device capable of obtaining highly precise bright and dark field signal images, by clearly separating a bright field signal electron from a dark field signal electron even if a scanning range on a sample changes. SOLUTION: A deflection coil 10 is provided under a sample 9, and a dark field signal detector 15 having an opening 15a is provided under the deflection coil. A bright field signal detector 16 is provided under the opening. A bright field signal particle beam 11 is synchronized with scanning of the particle beam and deflected in the direction opposite to the deflection of the particle beam by the deflection yoke under the sample. Thereby, the bright field signal particle beam passes through the opening of the dark field signal detector, and is detected by the bright field signal detector. COPYRIGHT: (C)2008,JPO&INPIT
|
