发明名称 PIEZOELECTRIC ELEMENT, METHOD OF MANUFACTURING THE SAME, LIQUID-JET HEAD, METHOD OF MANUFACTURING THE SAME, AND LIQUID-JET APPARATUS
摘要 Disclosed are a piezoelectric element, which has a high withstand voltage and a longer durability life, a manufacturing method of the piezoelectric element, a liquid-jet head, a manufacturing method of the liquid-jet head, and a liquid-jet apparatus. The manufacturing method of a piezoelectric element includes the steps of: forming a piezoelectric layer by forming, on the lower electrode, a piezoelectric precursor film in which Pb, Zr and Ti are contained and the composition ratio of Pb, Zr and Ti becomes Pb/(Zr+Ti)=1.0 to 1.3 after the piezoelectric precursor film has been baked, and to which at least any one dopant selected from the group consisting of manganese, nickel and strontium is doped, and by then baking the piezoelectric precursor film for half an hour to three hours at 650 to 750° C.; and forming an upper electrode on the piezoelectric layer.
申请公布号 US2008213468(A1) 申请公布日期 2008.09.04
申请号 US20080038875 申请日期 2008.02.28
申请人 SEIKO EPSON CORPORATION 发明人 LI XIN-SHAN
分类号 B05D3/14 主分类号 B05D3/14
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