DEVICE FOR GENERATING COLD PLASMA IN A VACUUM CHAMBER AND USE OF SAID DEVICE FOR THERMO-CHEMICAL PROCESSING

摘要

The invention relates to a device for generating a cold plasma in a vacuum chamber and to the use of said device for thermo-chemical processing. The device includes a cathode (1) with hollow cavities (1a) for confining the plasma. Means (2) are provided about each hollow cavity (1a), and said means are capable of generating a magnetic field that forces the electrons to revolve about the field lines, the body of the cathode (1) interacting with a member (3) that allows for a flow of coolant for extracting the calories generated by the intense ionic bombarding at each one of said hollow cavities (1a).