| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for coating a die with ultrananocrystal diamond (UNCD) film. SOLUTION: Trigger discharge is generated between a cathode electrode 142 composed of graphite and a trigger electrode 144, arc discharge is induced between an anode electrode 141 and the cathode electrode 142 and the ions of carbon vapor are released into a vacuum tank 10. The inside of the vacuum tank 10 is made into a hydrogen gas atmosphere, and the carbon vapor having charges is made to reach a die 20. When an intermediate layer 21 composed of an SiC film is formed on the surface of the die 20, ultrananocrystal diamond (UNCD) grows. COPYRIGHT: (C)2008,JPO&INPIT
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