| 发明名称 |
METHOD FOR FORMING SrTiO3 FILM AND STORAGE MEDIUM |
| 摘要 |
<p>A substrate is arranged in a processing chamber, the substrate is heated, and an Sr material, a Ti material and an oxidizing agent are introduced into the processing chamber in the form of gas, the gases are reacted on the heated substrate, and an SrTiO<SUB>3</SUB> film is formed on the substrate. As the Sr material, an Sr amine compound or an Sr imine compound is used.</p> |
| 申请公布号 |
WO2008105451(A1) |
申请公布日期 |
2008.09.04 |
| 申请号 |
WO2008JP53391 |
申请日期 |
2008.02.27 |
| 申请人 |
TOKYO ELECTRON LIMITED;KAKIMOTO, AKINOBU;KAWANO, YUMIKO |
发明人 |
KAKIMOTO, AKINOBU;KAWANO, YUMIKO |
| 分类号 |
H01L21/316;C23C16/40;C23C16/455;C23C16/52 |
主分类号 |
H01L21/316 |
| 代理机构 |
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| 主权项 |
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