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发明名称
Metallorganische Komplexe und deren Verwendung als Vorläuferverbindungen für die Abscheidung von Metallfilmen
摘要
申请公布号
DE602006001873(D1)
申请公布日期
2008.09.04
申请号
DE200660001873T
申请日期
2006.01.31
申请人
AIR PRODUCTS AND CHEMICALS INC.
发明人
LEI, XINJIAN;XIAO, MANCHAO;THRIDANDAM, HAREESH;CUTHILL, KIRK SCOTT
分类号
C07F15/00
主分类号
C07F15/00
代理机构
代理人
主权项
地址
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