TEMPERATURE CONTROL MECHANISM

摘要

PROBLEM TO BE SOLVED: To provide an effective temperature control mechanism when applied to a development device which has two series of pipe arrangements for developing solution. SOLUTION: The inside of the jacket 10 of a temperature control mechanism 6 is divided into two channels 10a and 10b by a divider plate 14 whose one end is opened. These channels 10a and 10b are connected in the part of the end where the divider plate 14 is opened. At the end of one jacket 10 of the side where the divider plate 14 is not opened, a temperature control stream inlet 15 is provided while a temperature control water outlet 16 being provided under the same end. Further, the pipe arrangements 11 and 12 for chemical solution are penetrated in each channel 10a and 10b formed by being divided into two by the divider plate 14. COPYRIGHT: (C)2006,JPO&NCIPI