SUBSTRATE HEATING APPARATUS AND MULTI-CHAMBER SUBSTRATE PROCESSING SYSTEM,申请号KR20040067689-传众专利搜索

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发明名称	SUBSTRATE HEATING APPARATUS AND MULTI-CHAMBER SUBSTRATE PROCESSING SYSTEM
摘要
申请公布号	KR100620272(B1)	申请公布日期	2006.09.08
申请号	KR20040067689	申请日期	2004.08.27
申请人		发明人
分类号	C23C16/46;F27B5/14;F27B17/00;F27D11/00;H01L21/00;H01L21/02;H01L21/31;H01L21/324;H01L21/677;H01L21/68	主分类号	C23C16/46
代理机构		代理人
主权项
地址

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