MANUFACTURING METHOD OF MAGNETIC SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a compact magnetic sensor capable of detecting magnetic field intensity in triaxial directions by arranging three or more giant magnetoresistance elements on one substrate. SOLUTION: Four GMR elements 2a to 2d comprising an X-axis sensor and four GMR elements 3e to 3h comprising a Y-axis sensor are arranged on a flat face of thick film formed on the substrate 1. A Z-axis sensor is comprised of four GMR elements 4i to 4l formed on a slant face of a plurality of grooves formed by etching a part of the thick film. COPYRIGHT: (C)2007,JPO&INPIT