Mask set for microarray, method of fabricating mask set, and method of fabricating microarray using mask set

摘要

A mask set with a light-transmitting region of a controlled size includes a plurality of masks for performing in-situ synthesis on probes of a microarray, wherein each mask includes a light-transmitting region and a light-blocking region, and the size of the light-transmitting region is equal to or greater than about 5 % of the total size of the light-transmitting and light-blocking regions.