| 发明名称 |
OPTICAL MICRO CANTILEVER, METHOD OF MANUFACTURE THEREOF, AND MICRO CANTILEVER HOLDER |
| 摘要 |
<p>A low-loss optical micro cantilever (10) comprises a support (1), an optical waveguide (2), an opaque film (3), a reflective film (4), a chip (5) with a pointed end, a minute opening (6) in the pointed of the chip (5), and a reflective mirror (7) for directing the light (H) from an optical input/output end (8) of the optical waveguide (2) toward the minute opening (6). <IMAGE></p> |
| 申请公布号 |
EP1089066(B1) |
申请公布日期 |
2008.09.03 |
| 申请号 |
EP20000906740 |
申请日期 |
2000.03.06 |
| 申请人 |
SEIKO INSTRUMENTS INC. |
发明人 |
NIWA, TAKASHI;KATO, KENJI;ICHIHARA, SUSUMU;CHIBA, NORIO;MITSUOKA, YASUYUKI;OUMI, MANABU;KASAMA, NOBUYUKI |
| 分类号 |
G01B11/30;G01B5/28;G01B11/00;G01B21/30;G01Q30/02;G01Q60/06;G01Q60/22;G01Q60/32;G01Q60/38;G01Q70/02 |
主分类号 |
G01B11/30 |
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